Overview

Evaluation Equipments for common use

Number Equipment Name Purpose Wafer Size
1 Scanning Transmission Type Electron Microscope（STEM） Physical structure analysis Chip
2 Focused Ion Beam Machining and Observation Apparatus（ＦＩＢ） Analysis sample machining Chip
3 Scanning Electron Microscope（SEM） Physical structure analysis Chip
4 X-ray Photoelectron Spectroscopy（XPS） Interface composition/
Chemical bond analysis		 Chip
5 X-ray Diffractometer（XRD） Composition/Crystallinity/
Distorted stress analysis		 Chip
6 Ion Coater Analysis sample processing Chip
7 Micro Sampling Apparatus Analysis sample processing －
8 Draft Chamber Analysis sample processing －
9 Laser Marker Analysis sample processing 300mm
10 Spectroscopic Ellipsometer Insulating thin film thickness measurement 300mm
11 X-ray Fluorescence Analyzer（XRF） Metal thin film thickness measurement 300mm
12 Scanning Probe Microscope（SPM） Surface morphology/Steps measurement 300mm
13 Seat Resistance Measuring Instrument Metal/Diffussion layer sheet resistance measurement 300mm/FOUP Specification
14 MR Ratio Measuring Instrument Magnetic Tunneling Junction sheet resistance measurement 300mm
15 Vibrating Sample Magnetometer（VSM） Magnetization curve measurement Chip
16 Magnetic Torque Meter Magnetic torque measurement Chip
17 Optical Microscope Visual inspection 300mm
18 Wafer Surface Analyzer Particle inspection 300mm/FOUP Specification
19 Total Reflection X-rays Fluorescence Analyzer（TXRF） Metal contamination inspection 300mm/FOUP Specification
20 Chip Annealing Equipment Anneal in the magnetic field Chip
21 Measurement System
for MTJ/Transistor Device		 Electrical Measurement,
Semi-Automatic, -40~+200°C		 300mm
22 Measurement System
for MTJ/Transistor Device		 Electrical Measurement,
Semi-Automatic, RT~+200°C		 300mm
23 Measurement System for MTJ/Transistor Device Electrical Measurement,
Full-Automatic, -60~+200°C		 300mm/FOUP
24 Measurement System
for MTJ Device with Magnetic Field Application Function		 Electrical & Magnetic Measurement, Manual, RT 300mm
25 Measurement System
for MTJ Device with Magnetic Field Application Function		 Electrical&Magnetic Measurement,
Semi-Automatic, RT		 300mm
26 Measurement System
for MTJ/Transistor Device
~ LSI Chip 		Electrical Measurement, Manual, RT~+300°C 300mm
27 Memory LSI Test System Memory LSI Function&Evaluation Test,
Full-Automatic, RT~+150°C		 300mm/FOUP
28 High voltage measurement system for power devices Electrical measurement for power devices, Manual,
RT～+300℃		 150mm
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